Your search for plasma enhanced atomic layer deposition publications authored by Koen de Peuter returned 3 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Low-Temperature Plasma-Assisted Atomic Layer Deposition of Silicon Nitride Moisture Permeation Barrier Layers|
|2||Redeposition in plasma-assisted atomic layer deposition: Silicon nitride film quality ruled by the gas residence time|
|3||Role of Surface Termination in Atomic Layer Deposition of Silicon Nitride|
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