A. Ma Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by A. Ma returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Selective Deposition of Low Temperature AlN Ohmic Contacts for GaN Devices
2Impact of Post Fabrication Annealing PEALD ZrO2 for GaN MOSFETs