Marcus Bär Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Marcus Bär returned 1 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1In-system photoelectron spectroscopy study of tin oxide layers produced from tetrakis(dimethylamino)tin by plasma enhanced atomic layer deposition