Chi Kyu Choi Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Chi Kyu Choi returned 3 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Method of sealing pores in porous low-k SiOC(-H) films fabricated using plasma-assisted atomic layer deposition
2Characteristics of SiOC(-H) Thin Films Prepared by Using Plasma-enhanced Atomic Layer Deposition
3Interface Properties of Nickel-silicide Films Deposited by Using Plasma-assisted Atomic Layer Deposition