Your search for plasma enhanced atomic layer deposition publications authored by Chris Hodson returned 5 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||A comparison between remote plasma-enhanced and thermal ALD of Hafnium-nitride thin films|
|2||Deposition of TiN and HfO2 in a commercial 200 mm remote plasma atomic layer deposition reactor|
|3||Plasma-enhanced atomic layer deposition and etching of high-k gadolinium oxide|
|4||Preliminary investigation of high-k materials - TiO2 doped Ta2O5 films by remote plasma ALD|
|5||Silicon Nitride and Silicon Oxide Thin Films by Plasma ALD|
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