Hyun-Tak Kim Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Hyun-Tak Kim returned 1 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Characteristics of AlxTi1-xOy Films Grown by Plasma-Enhanced Atomic Layer Deposition