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Jan Dellith Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by Jan Dellith returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
| Number | Title |
|---|---|
| 1 | Atomic layer deposition of AlN for thin membranes using trimethylaluminum and H2/N2 plasma |
| 2 | 3D structure evolution using metastable atomic layer deposition based on planar silver templates |