Hua Jiang Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Hua Jiang returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Blistering mechanisms of atomic-layer-deposited AlN and Al2O3 films
2Protective capping and surface passivation of III-V nanowires by atomic layer deposition