Hyo Jin Kim Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Hyo Jin Kim returned 4 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Plasma-Enhanced Atomic Layer Deposition of SiN-AlN Composites for Ultra Low Wet Etch Rates in Hydrofluoric Acid
2Atomic layer deposition by reaction of molecular oxygen with tetrakisdimethylamido-metal precursors
3Electrical Properties of Ultrathin Platinum Films by Plasma-Enhanced Atomic Layer Deposition
4Correlation of film density and wet etch rate in hydrofluoric acid of plasma enhanced atomic layer deposited silicon nitride