Kresimir Salamon Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Kresimir Salamon returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Residual chlorine in TiO2 films grown at low temperatures by plasma enhanced atomic layer deposition
2Prevention of spontaneous combustion of cellulose with a thin protective Al2O3 coating formed by atomic layer deposition