Harm C. M. Knoops Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Harm C. M. Knoops returned 19 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1'Zero-charge' SiO2/Al2O3 stacks for the simultaneous passivation of n+ and p+ doped silicon surfaces by atomic layer deposition
2Atomic Layer Deposition of LiCoO2 Thin-Film Electrodes for All-Solid-State Li-Ion Micro-Batteries
3Atomic Layer Deposition of Silicon Nitride from Bis(tert-butylamino)silane and N2 Plasma
4Atomic Layer Deposition of Silicon Nitride from Bis(tertiary-butyl-amino)silane and N2 Plasma Studied by in Situ Gas Phase and Surface Infrared Spectroscopy
5Atomic Layer Deposition of Wet-Etch Resistant Silicon Nitride Using Di(sec-butylamino)silane and N2 Plasma on Planar and 3D Substrate Topographies
6Co3O4 as Anode Material for Thin Film ĀµBatteries prepared by Remote Plasma Atomic Layer Deposition
7Low-Temperature Plasma-Assisted Atomic Layer Deposition of Silicon Nitride Moisture Permeation Barrier Layers
8Optical emission spectroscopy as a tool for studying, optimizing, and monitoring plasma-assisted atomic layer deposition processes
9Plasma-assisted atomic layer deposition of conformal Pt films in high aspect ratio trenches
10Plasma-enhanced atomic layer deposition of tungsten oxide thin films using (tBuN)2(Me2N)2W and O2 plasma
11Reaction mechanisms of atomic layer deposition of TaNx from Ta(NMe2)5 precursor and H2-based plasmas
12Redeposition in plasma-assisted atomic layer deposition: Silicon nitride film quality ruled by the gas residence time
13Remote Plasma ALD of Platinum and Platinum Oxide Films
14Remote Plasma and Thermal ALD of Platinum and Platinum Oxide Films
15Remote Plasma Atomic Layer Deposition of Co3O4 Thin Film
16Remote Plasma Atomic Layer Deposition of Co3O4 Thin Films
17Role of Surface Termination in Atomic Layer Deposition of Silicon Nitride
18Room-Temperature Atomic Layer Deposition of Platinum
19Surface reactions during atomic layer deposition of Pt derived from gas phase infrared spectroscopy

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I am sure there are papers I have not found. I am sure there is an occasional typo or omission in the database entries. I have hundreds of pre-2009 papers yet to add. As a result, the information provided is not perfect and not complete. Don't blame Plasma-ALD-Guy if the use of information on this site does not work out for you. If you know of publications I have missed or a database entry is wrong, send me an email at: plasma-ald-guy@plasma-ald.com

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