Pierre Morin Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Pierre Morin returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Evaluation of plasma parameters on PEALD deposited TaCN
2Engineering high quality and conformal ultrathin SiNx films by PEALD for downscaled and advanced CMOS nodes