Tobias Ohrdes Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Tobias Ohrdes returned 1 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Injection dependence of the effective lifetime of n-type Si passivated by Al2O3: An edge effect?