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Hangil Kim Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by Hangil Kim returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
| Number | Title |
|---|---|
| 1 | Formation of Ni silicide from atomic layer deposited Ni |
| 2 | Properties of plasma-enhanced atomic layer deposited TiCx films as a diffusion barrier for Cu metallization |