Your search for plasma enhanced atomic layer deposition publications authored by Alexander Pyymaki Perros returned 5 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Atomic Layer Engineering of Er-Ion Distribution in Highly Doped Er:Al2O3 for Photoluminescence Enhancement|
|2||High-k GaAs metal insulator semiconductor capacitors passivated by ex-situ plasma-enhanced atomic layer deposited AlN for Fermi-level unpinning|
|3||Influence of plasma chemistry on impurity incorporation in AlN prepared by plasma enhanced atomic layer deposition|
|4||Plasma etch characteristics of aluminum nitride mask layers grown by low-temperature plasma enhanced atomic layer deposition in SF6 based plasmas|
|5||Structural and chemical analysis of annealed plasma-enhanced atomic layer deposition aluminum nitride films|
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