Quentin Smets Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Quentin Smets returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1WS2 transistors on 300 mm wafers with BEOL compatibility
2Nucleation mechanism during WS2 plasma enhanced atomic layer deposition on amorphous Al2O3 and sapphire substrates