Chris M. Fancher Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Chris M. Fancher returned 3 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1The effects of layering in ferroelectric Si-doped HfO2 thin films
2TaN interface properties and electric field cycling effects on ferroelectric Si-doped HfO2 thin films
3Ferroelectric phenomena in Si-doped HfO2 thin films with TiN and Ir electrodes