Marc Schaekers Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Marc Schaekers returned 3 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Low temperature plasma-enhanced atomic layer deposition of thin vanadium nitride layers for copper diffusion barriers
2Near room temperature plasma enhanced atomic layer deposition of ruthenium using the RuO4-precursor and H2-plasma
3Scalability of plasma enhanced atomic layer deposited ruthenium films for interconnect applications