Peng Zhou Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Peng Zhou returned 4 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Optical properties and bandgap evolution of ALD HfSiOx films
2Resistive switching properties of plasma enhanced-ALD La2O3 for novel nonvolatile memory application
3Plasma enhanced atomic layer deposited platinum thin film on Si substrate with TMA pretreatment
4Direct Growth of Al2O3 on Black Phosphorus by Plasma-Enhanced Atomic Layer Deposition