Mengdi Yang Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Mengdi Yang returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

1Comparison of tungsten films grown by CVD and hot-wire assisted atomic layer deposition in a cold-wall reactor
2Hot-wire assisted ALD of tungsten films: In-situ study of the interplay between CVD, etching, and ALD modes


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