Eun-Jeong Kim Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Eun-Jeong Kim returned 1 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Highly Conductive HfNx Films Prepared by Plasma-Assisted Atomic Layer Deposition