Petro Deminskyi Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Petro Deminskyi returned 7 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Resolving Impurities in Atomic Layer Deposited Aluminum Nitride through Low Cost, High Efficiency Precursor Design
2Atomic layer deposition of InN using trimethylindium and ammonia plasma
3Direct epitaxial nanometer-thin InN of high structural quality on 4H-SiC by atomic layer deposition