A. Kemmeren Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by A. Kemmeren returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Plasma-assisted atomic layer deposition of TiN films at low deposition temperature for high-aspect ratio applications
2Plasma-assisted atomic layer deposition of TiN monitored by in situ spectroscopic ellipsometry