S. Blonkowski Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by S. Blonkowski returned 1 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Wideband frequency and in situ characterization of ultra thin ZrO2 and HfO2 films for integrated MIM capacitors