Massimo Tallarida Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Massimo Tallarida returned 3 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Ellipsometry and XPS comparative studies of thermal and plasma enhanced atomic layer deposited Al2O3-films
2Capacitance and conductance versus voltage characterization of Al2O3 layers prepared by plasma enhanced atomic layer deposition at 25°C<T<200°C
3Graphene oxide monolayers as atomically thin seeding layers for atomic layer deposition of metal oxides