Juhwan Park Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Juhwan Park returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1A study on film thickness control of vertical flow showerhead reactor for RF plasma deposition
2Bottom-up plasma-enhanced atomic layer deposition of SiO2 by utilizing growth inhibition using NH3 plasma pre-treatment for seamless gap-fill process