Joyeeta Nag Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Joyeeta Nag returned 1 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1ALD TaN Barrier for Enhanced Performance with Low Contact Resistance for 14nm Technology Node Cu Interconnects