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Benoit Hackens Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by Benoit Hackens returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
| Number | Title |
|---|---|
| 1 | Damage evaluation in graphene underlying atomic layer deposition dielectrics |
| 2 | Using top graphene layer as sacrificial protection during dielectric atomic layer deposition |