Natalia P. Bobrysheva Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Natalia P. Bobrysheva returned 1 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Atomic layer deposition of tin oxide using tetraethyltin to produce high-capacity Li-ion batteries