Kuo-Hsiung Chu Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Kuo-Hsiung Chu returned 1 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1AlN Surface Passivation of GaN-Based High Electron Mobility Transistors by Plasma-Enhanced Atomic Layer Deposition