Gijs Dingemans Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Gijs Dingemans returned 15 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

1'Zero-charge' SiO2/Al2O3 stacks for the simultaneous passivation of n+ and p+ doped silicon surfaces by atomic layer deposition
2Controlling the fixed charge and passivation properties of Si(100)/Al2O3 interfaces using ultrathin SiO2 interlayers synthesized by atomic layer deposition
3Excellent Si surface passivation by low temperature SiO2 using an ultrathin Al2O3 capping film
4Hydrogen induced passivation of Si interfaces by Al2O3 films and SiO2/Al2O3 stacks
5Influence of annealing and Al2O3 properties on the hydrogen-induced passivation of the Si/SiO2 interface
6Influence of the Deposition Temperature on the c-Si Surface Passivation by Al2O3 Films Synthesized by ALD and PECVD
7Influence of the Oxidant on the Chemical and Field-Effect Passivation of Si by ALD Al2O3
8Low Temperature Plasma-Enhanced Atomic Layer Deposition of Metal Oxide Thin Films
9Plasma-Assisted ALD for the Conformal Deposition of SiO2: Process, Material and Electronic Properties
10Plasma-Assisted Atomic Layer Deposition of Low Temperature SiO2
11Plasma-enhanced and thermal atomic layer deposition of Al2O3 using dimethylaluminum isopropoxide, [Al(CH3)2(μ-OiPr)]2, as an alternative aluminum precursor
12Role of field-effect on c-Si surface passivation by ultrathin (2-20 nm) atomic layer deposited Al2O3
13Silicon surface passivation by ultrathin Al2O3 films synthesized by thermal and plasma atomic layer deposition
14Stability of Al2O3 and Al2O3/a-Six:H stacks for surface passivation of crystalline silicon
15Status and prospects of Al2O3-based surface passivation schemes for silicon solar cells


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