Jill S. Becker Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Jill S. Becker returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Plasma-Enabled ALD of Niobium Nitride Using an Organometallic Nb Precursor
2Conformal Fe, Co and Ni Films from Oxides and Nitrides Grown by Atomic Layer Deposition