Çağla Özgit Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Çağla Özgit returned 29 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Atomic Layer Deposition of AlN Thin Films in Three Different Growth Regimes
2Atomic layer deposition of GaN at low temperatures
3Current transport mechanisms in plasma-enhanced atomic layer deposited AlN thin films
4Effect of Film Thickness on the Electrical Properties of AlN Films Prepared by Plasma-Enhanced Atomic Layer Deposition
5Effect of postdeposition annealing on the electrical properties of beta-Ga2O3 thin films grown on p-Si by plasma-enhanced atomic layer deposition
6Electrical characteristics of β-Ga2O3 thin films grown by PEALD
7Electronic and optical device applications of hollow cathode plasma assisted atomic layer deposition based GaN thin films
8Fabrication of AlN/BN bishell hollow nanofibers by electrospinning and atomic layer deposition
9Fabrication of flexible polymer-GaN core-shell nanofibers by the combination of electrospinning and hollow cathode plasma-assisted atomic layer deposition
10Hollow cathode plasma-assisted atomic layer deposition of crystalline AlN, GaN and AlxGa1-xN thin films at low temperatures
11Low temperature deposition of Ga2O3 thin films using trimethylgallium and oxygen plasma
12Low temperature thin film transistors with hollow cathode plasma-assisted atomic layer deposition based GaN channels
13Low-Temperature Deposition of Hexagonal Boron Nitride Via Sequential Injection of Triethylboron and N2/H2 Plasma
14Low-temperature grown wurtzite InxGa1-xN thin films via hollow cathode plasma-assisted atomic layer deposition
15Low-temperature hollow cathode plasma-assisted atomic layer deposition of crystalline III-nitride thin films and nanostructures
16Low-Temperature Self-Limiting Growth of III-Nitride Thin Films by Plasma-Enhanced Atomic Layer Deposition
17Low-temperature sequential pulsed chemical vapor deposition of ternary BxGa1-xN and BxIn1-xN thin film alloys
18Metal-semiconductor-metal ultraviolet photodetectors based on gallium nitride grown by atomic layer deposition at low temperatures
19Optical characteristics of nanocrystalline AlxGa1-xN thin films deposited by hollow cathode plasma-assisted atomic layer deposition
20Optical properties of AlN thin films grown by plasma enhanced atomic layer deposition
21Plasma-Enhanced Atomic Layer Deposition of III-Nitride Thin Films
22Self-Limiting Growth of GaN at Low Temperatures
23Self-limiting growth of GaN using plasma-enhanced atomic layer deposition
24Self-limiting low-temperature growth of crystalline AlN thin films by plasma-enhanced atomic layer deposition
25Structural properties of AlN films deposited by plasma-enhanced atomic layer deposition at different growth temperatures
26Template-assisted synthesis of III-nitride and metal-oxide nano-heterostructures using low-temperature atomic layer deposition for energy, sensing, and catalysis applications (Presentation Recording)
27Template-Based Synthesis of Aluminum Nitride Hollow Nanofibers Via Plasma-Enhanced Atomic Layer Deposition
28The Influence of Growth Temperature on the Properties of AlN Films Grown by Atomic Layer Deposition
29The influence of N2/H2 and ammonia N source materials on optical and structural properties of AlN films grown by plasma enhanced atomic layer deposition

Disclaimer

I am sure there are papers I have not found. I am sure there is an occasional typo or omission in the database entries. I have hundreds of pre-2009 papers yet to add. As a result, the information provided is not perfect and not complete. Don't blame Plasma-ALD-Guy if the use of information on this site does not work out for you. If you know of publications I have missed or a database entry is wrong, send me an email at: plasma-ald-guy@plasma-ald.com

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