Klaus J. Weber Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Klaus J. Weber returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Degradation of the surface passivation of plasma-assisted ALD Al2O3 under damp-heat exposure
2Investigation of field-effect passivation and interface state parameters at the Al2O3/Si interface