Qing-Hui Yang Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Qing-Hui Yang returned 1 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Tuning the phase transitions of VO2 thin films on silicon substrates using ultrathin Al2O3 as buffer layers