Adriaan J. M. Mackus Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Adriaan J. M. Mackus returned 10 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Atomic Layer Deposition of High-Purity Palladium Films from Pd(hfac)2 and H2 and O2 Plasmas
2Atomic layer deposition of Pd and Pt nanoparticles for catalysis: on the mechanisms of nanoparticle formation
3Catalytic Combustion and Dehydrogenation Reactions during Atomic Layer Deposition of Platinum
4In situ spectroscopic ellipsometry during atomic layer deposition of Pt, Ru and Pd
5Nucleation and growth of Pt atomic layer deposition on Al2O3 substrates using (methylcyclopentadienyl)-trimethyl platinum and O2 plasma
6Optical emission spectroscopy as a tool for studying, optimizing, and monitoring plasma-assisted atomic layer deposition processes
7Remote Plasma ALD of Platinum and Platinum Oxide Films
8Remote Plasma and Thermal ALD of Platinum and Platinum Oxide Films
9Room-Temperature Atomic Layer Deposition of Platinum
10Surface reactions during atomic layer deposition of Pt derived from gas phase infrared spectroscopy

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I am sure there are papers I have not found. I am sure there is an occasional typo or omission in the database entries. I have hundreds of pre-2009 papers yet to add. As a result, the information provided is not perfect and not complete. Don't blame Plasma-ALD-Guy if the use of information on this site does not work out for you. If you know of publications I have missed or a database entry is wrong, send me an email at: plasma-ald-guy@plasma-ald.com

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