Kurt J Lesker ALD-150L Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications using Kurt J Lesker ALD-150L hardware returned 11 records. If there are too many results, you may want to use the multi-factor search to narrow the results.

1AxBAxB... pulsed atomic layer deposition: Numerical growth model and experiments
2Engineered Tunneling Contacts with Low-Temperature Atomic Layer Deposition of AlN on GaN
3Growth and Characterization of Metastable Hexagonal Nickel Thin Films via Plasma-Enhanced Atomic Layer Deposition
4Impact of Post Fabrication Annealing PEALD ZrO2 for GaN MOSFETs
5Performance enhancement of InAsSb QW-MOSFETs with in-situ H2 plasma cleaning for gate stack formation
6Polarization charge properties of low-temperature atomic layer deposition of AlN on GaN
7Selective Deposition of Low Temperature AlN Ohmic Contacts for GaN Devices
8Structural and optical characterization of low-temperature ALD crystalline AlN
9Ultra low density of interfacial traps with mixed thermal and plasma enhanced ALD of high-k gate dielectrics
10XPS analysis of AlN thin films deposited by plasma enhanced atomic layer deposition
11ZrO2 on GaN metal oxide semiconductor capacitors via plasma assisted atomic layer deposition


I am sure there are papers I have not found. I am sure there is an occasional typo or omission in the database entries. If you know of publications I have missed or a database entry is wrong, send me an email at: marksowa@plasma-ald.com

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