Your search for plasma enhanced atomic layer deposition publications using Cambridge NanoTech Savannah hardware returned 4 records. If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||A comparison between HfO2/Al2O3 nano-laminates and ternary HfxAlyO compound as the dielectric material in InGaAs based metal-oxide-semiconductor (MOS) capacitors|
|2||Charge Transport through Organic Molecular Wires Embedded in Ultrathin Insulating Inorganic Layer|
|3||Hydrophilic/hydrophobic surface of Al2O3 thin films grown by thermal and plasma-enhanced atomic layer deposition on plasticized polyvinyl chloride (PVC)|
|4||Practical Challenges of Processing III-Nitride/Graphene/SiC Devices|
I am sure there are papers I have not found. I am sure there is an occasional typo or omission in the database entries. I have hundreds of pre-2009 papers yet to add. As a result, the information provided is not perfect and not complete. Don't blame Plasma-ALD-Guy if the use of information on this site does not work out for you. If you know of publications I have missed or a database entry is wrong, send me an email at: email@example.com
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