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Custom ICP Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications using Custom ICP hardware returned 46 records. If there are too many results, you may want to use the multi-factor search to narrow the results.

1Atomic Layer Deposition of Aluminum Phosphate Based on the Plasma Polymerization of Trimethyl Phosphate
2Atomic Layer Deposition of Silicon Nitride from Bis(tertiary-butyl-amino)silane and N2 Plasma Studied by in Situ Gas Phase and Surface Infrared Spectroscopy
3Band alignment of zinc oxide as a channel layer in a gate stack structure grown by plasma enhanced atomic layer deposition
4Characteristics of Nickel Thin Film and Formation of Nickel Silicide by Remote Plasma Atomic Layer Deposition using Ni(iPr-DAD)2
5Characterization of plasma-enhanced atomic layer deposition of Al2O3 using dimethylaluminum isopropoxide
6Charge trapping characteristics of Au nanocrystals embedded in remote plasma atomic layer-deposited Al2O3 film as the tunnel and blocking oxides for nonvolatile memory applications
7Conformality of Al2O3 and AlN Deposited by Plasma-Enhanced Atomic Layer Deposition
8Deposition Of MnO Anode And MnO2 Cathode Thin Films By Plasma Enhanced Atomic Layer Deposition Using The Mn(thd)3 Precursor
9Deposition temperature dependence of titanium oxide thin films grown by remote-plasma atomic layer deposition
10Effect of Crystal Structure and Grain Size on Photo-Catalytic Activities of Remote-Plasma Atomic Layer Deposited Titanium Oxide Thin Film
11Fabrication and properties of AlN film on GaN substrate by using remote plasma atomic layer deposition method
12In situ reaction mechanism studies of plasma-assisted atomic layer deposition of Al2O3
13Infrared study on room-temperature atomic layer deposition of HfO2 using tetrakis(ethylmethylamino)hafnium and remote plasma-excited oxidizing agents
14Ion and Photon Surface Interaction during Remote Plasma ALD of Metal Oxides
15Low temperature growth of high-k Hf-La oxides by remote-plasma atomic layer deposition: Morphology, stoichiometry, and dielectric properties
16Low Temperature Plasma-Enhanced Atomic Layer Deposition of Metal Oxide Thin Films
17Photocatalytic activities of TiO2 thin films prepared on Galvanized Iron substrate by plasma-enhanced atomic layer deposition
18Photocatalytic functional coatings of TiO2 thin films on polymer substrate by plasma enhanced atomic layer deposition
19Plasma enhanced atomic layer deposition of aluminum sulfide thin films
20Plasma enhanced atomic layer deposition of zinc sulfide thin films
21Plasma Modeling of a PEALD System for the Deposition of TiO2 and HfO2
22Plasma Processing for Crystallization and Densification of Atomic Layer Deposition BaTiO3 Thin Films
23Plasma-assisted atomic layer deposition of conformal Pt films in high aspect ratio trenches
24Plasma-assisted atomic layer epitaxial growth of aluminum nitride studied with real time grazing angle small angle x-ray scattering
25Plasma-Enhanced Atomic Layer Deposition of Anatase TiO2 Using TiCl4
26Plasma-Enhanced Atomic Layer Deposition of Iron Phosphate as a Positive Electrode for 3D Lithium-Ion Microbatteries
27Plasma-enhanced atomic layer deposition of palladium on a polymer substrate
28Plasma-enhanced atomic layer deposition of titanium phosphate as an electrode for lithium-ion batteries
29Plasma-enhanced atomic layer deposition of zinc phosphate
30Plasma-enhanced atomic layer deposition: a gas-phase route to hydrophilic, glueable polytetrafluoroethylene
31Reaction mechanisms of atomic layer deposition of TaNx from Ta(NMe2)5 precursor and H2-based plasmas
32Remote Plasma ALD of SrTiO3 Using Cyclopentadienlyl-Based Ti and Sr Precursors
33Remote Plasma Atomic Layer Deposition of Co3O4 Thin Films
34Room-Temperature Atomic Layer Deposition of Platinum
35Substrate Biasing during Plasma-Assisted ALD for Crystalline Phase-Control of TiO2 Thin Films
36Surface band bending and band alignment of plasma enhanced atomic layer deposited dielectrics on Ga- and N-face gallium nitride
37Surface Reaction Mechanisms during Ozone and Oxygen Plasma Assisted Atomic Layer Deposition of Aluminum Oxide
38Surface Reaction Mechanisms during Plasma-Assisted Atomic Layer Deposition of Titanium Dioxide
39Surface reactions during atomic layer deposition of Pt derived from gas phase infrared spectroscopy
40Temperature dependence of silicon nitride deposited by remote plasma atomic layer deposition
41The effect of plasma power on the properties of low-temperature silicon nitride deposited by RPALD for a gate spacer
42The Effects of Radio Frequency Plasma Power on Al2O3 Films Deposited at Room-Temperature by Remote Plasma Atomic Layer Deposition
43The Influence of Ions and Photons during Plasma-Assisted ALD of Metal Oxides
44The properties of Ru films deposited by remote plasma atomic layer deposition on Ar plasma-treated SiO2
45Uniform GaN thin films grown on (100) silicon by remote plasma atomic layer deposition
46Wetting transitions of polymers via thermal and plasma enhanced atomic layer depositions


I am sure there are papers I have not found. I am sure there is an occasional typo or omission in the database entries. I have hundreds of pre-2009 papers yet to add. As a result, the information provided is not perfect and not complete. Don't blame Plasma-ALD-Guy if the use of information on this site does not work out for you. If you know of publications I have missed or a database entry is wrong, send me an email at:


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