Custom ICP Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications using Custom ICP hardware returned 47 records. If there are too many results, you may want to use the multi-factor search to narrow the results.

1Area-Selective Atomic Layer Deposition of Metal Oxides on Noble Metals through Catalytic Oxygen Activation
2Atomic Layer Deposition of Aluminum Phosphate Based on the Plasma Polymerization of Trimethyl Phosphate
3Atomic Layer Deposition of Silicon Nitride from Bis(tertiary-butyl-amino)silane and N2 Plasma Studied by in Situ Gas Phase and Surface Infrared Spectroscopy
4Band alignment of zinc oxide as a channel layer in a gate stack structure grown by plasma enhanced atomic layer deposition
5Characteristics of Nickel Thin Film and Formation of Nickel Silicide by Remote Plasma Atomic Layer Deposition using Ni(iPr-DAD)2
6Characterization of plasma-enhanced atomic layer deposition of Al2O3 using dimethylaluminum isopropoxide
7Charge trapping characteristics of Au nanocrystals embedded in remote plasma atomic layer-deposited Al2O3 film as the tunnel and blocking oxides for nonvolatile memory applications
8Conformality of Al2O3 and AlN Deposited by Plasma-Enhanced Atomic Layer Deposition
9Deposition Of MnO Anode And MnO2 Cathode Thin Films By Plasma Enhanced Atomic Layer Deposition Using The Mn(thd)3 Precursor
10Deposition temperature dependence of titanium oxide thin films grown by remote-plasma atomic layer deposition
11Effect of Crystal Structure and Grain Size on Photo-Catalytic Activities of Remote-Plasma Atomic Layer Deposited Titanium Oxide Thin Film
12Fabrication and properties of AlN film on GaN substrate by using remote plasma atomic layer deposition method
13In situ reaction mechanism studies of plasma-assisted atomic layer deposition of Al2O3
14Infrared study on room-temperature atomic layer deposition of HfO2 using tetrakis(ethylmethylamino)hafnium and remote plasma-excited oxidizing agents
15Ion and Photon Surface Interaction during Remote Plasma ALD of Metal Oxides
16Low temperature growth of high-k Hf-La oxides by remote-plasma atomic layer deposition: Morphology, stoichiometry, and dielectric properties
17Low Temperature Plasma-Enhanced Atomic Layer Deposition of Metal Oxide Thin Films
18Photocatalytic activities of TiO2 thin films prepared on Galvanized Iron substrate by plasma-enhanced atomic layer deposition
19Photocatalytic functional coatings of TiO2 thin films on polymer substrate by plasma enhanced atomic layer deposition
20Plasma enhanced atomic layer deposition of aluminum sulfide thin films
21Plasma enhanced atomic layer deposition of zinc sulfide thin films
22Plasma Modeling of a PEALD System for the Deposition of TiO2 and HfO2
23Plasma Processing for Crystallization and Densification of Atomic Layer Deposition BaTiO3 Thin Films
24Plasma-assisted atomic layer deposition of conformal Pt films in high aspect ratio trenches
25Plasma-assisted atomic layer epitaxial growth of aluminum nitride studied with real time grazing angle small angle x-ray scattering
26Plasma-Enhanced Atomic Layer Deposition of Anatase TiO2 Using TiCl4
27Plasma-Enhanced Atomic Layer Deposition of Iron Phosphate as a Positive Electrode for 3D Lithium-Ion Microbatteries
28Plasma-enhanced atomic layer deposition of palladium on a polymer substrate
29Plasma-enhanced atomic layer deposition of titanium phosphate as an electrode for lithium-ion batteries
30Plasma-enhanced atomic layer deposition of zinc phosphate
31Plasma-enhanced atomic layer deposition: a gas-phase route to hydrophilic, glueable polytetrafluoroethylene
32Reaction mechanisms of atomic layer deposition of TaNx from Ta(NMe2)5 precursor and H2-based plasmas
33Remote Plasma ALD of SrTiO3 Using Cyclopentadienlyl-Based Ti and Sr Precursors
34Remote Plasma Atomic Layer Deposition of Co3O4 Thin Films
35Room-Temperature Atomic Layer Deposition of Platinum
36Substrate Biasing during Plasma-Assisted ALD for Crystalline Phase-Control of TiO2 Thin Films
37Surface band bending and band alignment of plasma enhanced atomic layer deposited dielectrics on Ga- and N-face gallium nitride
38Surface Reaction Mechanisms during Ozone and Oxygen Plasma Assisted Atomic Layer Deposition of Aluminum Oxide
39Surface Reaction Mechanisms during Plasma-Assisted Atomic Layer Deposition of Titanium Dioxide
40Surface reactions during atomic layer deposition of Pt derived from gas phase infrared spectroscopy
41Temperature dependence of silicon nitride deposited by remote plasma atomic layer deposition
42The effect of plasma power on the properties of low-temperature silicon nitride deposited by RPALD for a gate spacer
43The Effects of Radio Frequency Plasma Power on Al2O3 Films Deposited at Room-Temperature by Remote Plasma Atomic Layer Deposition
44The Influence of Ions and Photons during Plasma-Assisted ALD of Metal Oxides
45The properties of Ru films deposited by remote plasma atomic layer deposition on Ar plasma-treated SiO2
46Uniform GaN thin films grown on (100) silicon by remote plasma atomic layer deposition
47Wetting transitions of polymers via thermal and plasma enhanced atomic layer depositions


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