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Beneq TFS-500 Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications using Beneq TFS-500 hardware returned 10 records. If there are too many results, you may want to use the multi-factor search to narrow the results.

1Breakdown and Protection of ALD Moisture Barrier Thin Films
2GaAs surface passivation by plasma-enhanced atomic-layer-deposited aluminum nitride
3High-k GaAs metal insulator semiconductor capacitors passivated by ex-situ plasma-enhanced atomic layer deposited AlN for Fermi-level unpinning
4Influence of plasma chemistry on impurity incorporation in AlN prepared by plasma enhanced atomic layer deposition
5Phase-change properties of GeSbTe thin films deposited by plasma-enchanced atomic layer depositon
6Plasma etch characteristics of aluminum nitride mask layers grown by low-temperature plasma enhanced atomic layer deposition in SF6 based plasmas
7Plasma-Assisted Atomic Layer Deposition of Al2O3 at Room Temperature
8Properties of AlN grown by plasma enhanced atomic layer deposition
9Silicon surface passivation with atomic layer deposited aluminum nitride
10Surface passivation of GaAs nanowires by the atomic layer deposition of AlN


I am sure there are papers I have not found. I am sure there is an occasional typo or omission in the database entries. I have hundreds of pre-2009 papers yet to add. As a result, the information provided is not perfect and not complete. Don't blame Plasma-ALD-Guy if the use of information on this site does not work out for you. If you know of publications I have missed or a database entry is wrong, send me an email at:


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