Veeco NEXUS Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications using Veeco NEXUS hardware returned 1 records. If there are too many results, you may want to use the multi-factor search to narrow the results.

1Low-temperature (≤200°C) plasma enhanced atomic layer deposition of dense titanium nitride thin films


I am sure there are papers I have not found. I am sure there is an occasional typo or omission in the database entries. If you know of publications I have missed or a database entry is wrong, send me an email at:


Follow @PlasmaALDGuy


© 2014-2018