Your search for plasma enhanced atomic layer deposition publications using Custom Remote hardware returned 3 records. If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Characteristics of Cobalt Thin Films Deposited by Remote Plasma ALD Method with Dicobalt Octacarbonyl|
|2||Controllable nitrogen doping in as deposited TiO2 film and its effect on post deposition annealing|
|3||Effects of an Al2O3 capping layer on La2O3 deposited by remote plasma atomic layer deposition|
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