Your search for plasma enhanced atomic layer deposition publications using ASM Pulsar 2000 hardware returned 2 records. If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Thermal and Plasma Enhanced Atomic Layer Deposition of Al2O3 on GaAs Substrates|
|2||TiCl4 as a Precursor in the TiN Deposition by ALD and PEALD|
I am sure there are papers I have not found. I am sure there is an occasional typo or omission in the database entries. I have hundreds of pre-2009 papers yet to add. As a result, the information provided is not perfect and not complete. Don't blame Plasma-ALD-Guy if the use of information on this site does not work out for you. If you know of publications I have missed or a database entry is wrong, send me an email at: firstname.lastname@example.org
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