Your search for plasma enhanced atomic layer deposition publications using Quros Plus 200 hardware returned 5 records. If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Effects of H2 plasma and annealing on atomic-layer-deposited Al2O3 films and Al/Al2O3/Si structures|
|2||HfO2/HfOxNy/HfO2 Gate Dielectric Fabricated by In Situ Oxidation of Plasma-Enhanced Atomic Layer Deposition HfN Middle Layer|
|3||Influence of Substrates on the Nucleation and Growth Behaviors of Ge2Sb2Te5 Films by Combined Plasma-Enhanced Atomic Layer and Chemical Vapor Deposition|
|4||N-doped TiO2 nanotubes coated with a thin TaOxNy layer for photoelectrochemical water splitting: dual bulk and surface modification of photoanodes|
|5||Photoelectrochemical hydrogen production on silicon microwire arrays overlaid with ultrathin titanium nitride|
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