TEL Phoenix CVD cluster tool Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications using TEL Phoenix CVD cluster tool hardware returned 5 records. If there are too many results, you may want to use the multi-factor search to narrow the results.

1Copper-ALD Seed Layer as an Enabler for Device Scaling
2Hydrogen plasma-enhanced atomic layer deposition of copper thin films
3Integration of Atomic Layer Deposition-Grown Copper Seed Layers for Cu Electroplating Applications
4The Integration of Plasma Enhanced Atomic Layer Deposition (PEALD) of Tantalum- Based Thin Films for Copper Diffusion Barrier Applications
5Ultra-Low Temperature Deposition of Copper Seed Layers by PEALD


I am sure there are papers I have not found. I am sure there is an occasional typo or omission in the database entries. If you know of publications I have missed or a database entry is wrong, send me an email at:


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