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SENTECH Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications using SENTECH hardware returned 19 records. If there are too many results, you may want to use the multi-factor search to narrow the results.

1Advances in the fabrication of graphene transistors on flexible substrates
2Ag films grown by remote plasma enhanced atomic layer deposition on different substrates
3Analysis of nitrogen species in titanium oxynitride ALD films
4Analysis of titanium species in titanium oxynitride films prepared by plasma enhanced atomic layer deposition
5Atomic Layer Deposition of Al2O3 Thin Films for Metal Insulator Semiconductor Applications on 4H-SiC
6Breakdown and Protection of ALD Moisture Barrier Thin Films
7Capacitance and conductance versus voltage characterization of Al2O3 layers prepared by plasma enhanced atomic layer deposition at 25°C<T<200°C
8Comparative study of ALD SiO2 thin films for optical applications
9Crystalline growth of AlN thin films by atomic layer deposition
10Ellipsometry and XPS comparative studies of thermal and plasma enhanced atomic layer deposited Al2O3-films
11Flexible, light trapping substrates for organic photovoltaics
12Laminated Al2O3-HfO2 layers grown by atomic layer deposition for microelectronics applications
13Localized defect states and charge trapping in atomic layer deposited-Al2O3 films
14Moisture barrier properties of thin organic-inorganic multilayers prepared by plasma-enhanced ALD and CVD in one reactor
15Negative charge trapping effects in Al2O3 films grown by atomic layer deposition onto thermally oxidized 4H-SiC
16Plasma enhanced atomic layer deposition of Al2O3 gate dielectric thin films on AlGaN/GaN substrates: The role of surface predeposition treatments
17Plasma-enhanced atomic layer deposition of titanium oxynitrides films: A comparative spectroscopic and electrical study
18Thermal and plasma enhanced atomic layer deposition of TiO2: Comparison of spectroscopic and electric properties
19Three dimensional ALD of TiO2 for in-vivo biomedical sensor applications


I am sure there are papers I have not found. I am sure there is an occasional typo or omission in the database entries. I have hundreds of pre-2009 papers yet to add. As a result, the information provided is not perfect and not complete. Don't blame Plasma-ALD-Guy if the use of information on this site does not work out for you. If you know of publications I have missed or a database entry is wrong, send me an email at:


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