Your search for plasma enhanced atomic layer deposition publications discussing VOx films returned 5 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Atomic Layer Deposition of Ultrathin Crystalline Epitaxial Films of V2O5|
|2||Comparison of Thermal and Plasma-Enhanced ALD/CVD of Vanadium Pentoxide|
|3||Evaluation of V2O5 Coatings Grown By Plasma Enhanced and Thermal Atomic Layer Deposition|
|4||Plasma-Modified Atomic Layer Deposition|
|5||Tunable Electrical Properties of Vanadium Oxide by Hydrogen-Plasma-Treated Atomic Layer Deposition|
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