NbN Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications discussing NbN films returned 8 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

1Analysis of NbN thin film deposition by plasma-enhanced ALD for gate electrode application
2Atomic Layer Deposition of Niobium Nitride from Different Precursors
3Evaluation of NbN thin films grown by MOCVD and plasma-enhanced ALD for gate electrode application in high-k/SiO2 gate stacks
4Plasma-Enabled ALD of Niobium Nitride Using an Organometallic Nb Precursor
5Plasma-enhanced atomic layer deposition of superconducting niobium nitride
6Superconducting Characteristics of NbN Films Deposited by Atomic Layer Deposition
7Superconducting niobium nitride thin films deposited by metal organic plasma-enhanced atomic layer deposition
8Superconducting niobium titanium nitride thin films deposited by plasma-enhanced atomic layer deposition


I am sure there are papers I have not found. I am sure there is an occasional typo or omission in the database entries. If you know of publications I have missed or a database entry is wrong, send me an email at: marksowa@plasma-ald.com

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