Ga2O3 Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications discussing Ga2O3 films returned 12 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Atomic Layer Deposition of Gallium Oxide Films as Gate Dielectrics in AlGaN/GaN Metal-Oxide-Semiconductor High-Electron-Mobility Transistors
2Demonstration of c-Si Solar Cells With Gallium Oxide Surface Passivation and Laser-Doped Gallium p+ Regions
3Effect of postdeposition annealing on the electrical properties of beta-Ga2O3 thin films grown on p-Si by plasma-enhanced atomic layer deposition
4Electrical characteristics of β-Ga2O3 thin films grown by PEALD
5Fundamental reaction of RT gallium oxide atomic layer deposition investigated by IR absorption spectroscopy
6Low temperature deposition of Ga2O3 thin films using trimethylgallium and oxygen plasma
7Metal-insulator-semiconductor structure using Ga2O3 layer by plasma enhanced atomic layer deposition
8Plasma enhanced atomic layer deposition of Ga2O3 thin films
9Plasma enhanced atomic layer deposition of gallium oxide on crystalline silicon: demonstration of surface passivation and negative interfacial charge
10Room Temperature Atomic Layer Deposition of Gallium Oxide Investigated by IR Absorption Spectroscopy
11RT Ga2O3 atomic layer deposition by using trimethylgallium and water-oxygen plasma
12Silicon Surface Passivation by Gallium Oxide Capped With Silicon Nitride

Disclaimer

I am sure there are papers I have not found. I am sure there is an occasional typo or omission in the database entries. I have hundreds of pre-2009 papers yet to add. As a result, the information provided is not perfect and not complete. Don't blame Plasma-ALD-Guy if the use of information on this site does not work out for you. If you know of publications I have missed or a database entry is wrong, send me an email at: plasma-ald-guy@plasma-ald.com

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