Your search for plasma enhanced atomic layer deposition publications discussing TiON films returned 5 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Analysis of nitrogen species in titanium oxynitride ALD films|
|2||Analysis of titanium species in titanium oxynitride films prepared by plasma enhanced atomic layer deposition|
|3||Nitrogen-Doping of Bulk and Nanotubular TiO2 Photocatalysts by Plasma-Assisted Atomic Layer Deposition|
|4||Plasma-enhanced atomic layer deposition of titanium oxynitrides films: A comparative spectroscopic and electrical study|
|5||Titanium Oxynitride Interlayer to Influence Oxygen Reduction Reaction Activity and Corrosion Stability of Pt and Pt-Ni Alloy|
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